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I don't think it is a good idea to physically touch the MAF sensor with
anything other than Isopropyl Alcohol. I have cleaned mine a few times
by putting it in a large ziplock bag and filling it up with Isopropyl
Alcohol (99%) so that about 1/2 of the MAF is submerged. Then I shook
it up and transferred it to another ziplock bag and repeated the
process. I think in total, I did 3 rounds of cleaning, then let it air
dry over night.
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